2024

Vol.31 No.2

Editorial Office

Review

  • Journal of the Microelectronics and Packaging Society
  • Volume 27(4); 2020
  • Article

Review

Journal of the Microelectronics and Packaging Society 2020;27(4):91-96. Published online: Feb, 17, 2021

The 33-mode Dielectric and Piezoelectric Properties of PIN-PMN-PT Single Crystal under Stress and Electric Field

  • Jae Gwang Lim1, Jae Hwan Park1,†, Jeongho Lee2, Sang Goo Lee2
    1Department of Electronic Engineering, Korea National University of Transportation, 2Ibule Photonics
Corresponding author E-mail: pjh@ut.ac.kr
Abstract

Pb(In1/2Nb1/2)O3-Pb(Mg1/3Nb2/3)O3-PbTiO3계 압전 단결정의 유전특성과 압전특성을 전계 및 압축응력 인가 조 건 하에서 33-모드 방식으로 측정하였다. 110~140oC 영역에서 저온 rhombohedral 구조에서 고온 tetragonal 구조로의 상 전이가 관찰되었으며, cubic 구조로 변화하는 큐리온도는 165oC 정도로 나타났다. 압축응력 및 전계 변화에 따른 분극의 크기변화를 측정하였다. 전계인가 분극 곡선의 기울기로부터 비유전율을 계산하였고, 인가되는 응력의 크기가 증가할수 록 계산된 비유전율의 크기는 증가하고, 인가되는 전계의 크기가 증가할수록 비유전율의 크기는 감소하는 경향성을 나타 내었다. 압축응력 및 전계 변화에 따른 변위 거동을 측정하였으며, 곡선의 기울기로부터 압전상수를 계산하였고 압력인 가에 따른 상전이를 확인하였다. 수중 또는 의료용 초음파 발진자로 실제 응용할 경우 선형성을 유지하여 구동이 가능하 기 위하여 소자 기구물을 형성하는 단계에서 인가하게 되는 압축응력의 크기와 구동 전계의 DC 바이어스의 크기를 적절 하게 설계할 필요가 있다.
The 33-mode dielectric and piezoelectric properties of Pb(In1/2Nb1/2)O3-Pb(Mg1/3Nb2/3)O3-PbTiO3 piezoelectric single crystals were measured under large electric field and compressive stress. The phase transition from the low temperature rhombohedral to the high temperature tetragonal structure was observed in the range of 110~140oC, and the Curie temperature changing to the cubic structure was about 165oC. The polarization change according to the compressive stress and electric field was measured. Relative dielectric constant was calculated from the slope of the polarization curve applied to the electric field, and the calculated relative dielectric constant increased as the applied stress increased, and the relative dielectric constant decreased as the applied electric field increased. The strain according to the compressive stress and electric field change was measured, the piezoelectric constant was calculated from the slope of the curve, and the phase transition according to the application of pressure was confirmed. In the case of practical application as an underwater or medical ultrasonic actuator, it is necessary to properly design the magnitude of the compressive stress applied to the device and the DC bias in order to maintain linear driving.

Keywords Pb(Mg1/2Nb1/2)O3, PbTiO3, single crystal, large electric field, dielectric property, piezoelectric property