Journal of the Microelectronics and Packaging Society

논문에서는 고분자 나노구조 필름의 기계적 물성을 향상하기 위하여 광열효과를 이용한 열처리 공정을 응용 하여 나노임프린트로 제작된 고분자 나노구조 필름의 기계적 물성에 미치는 영향을 규명하였다. Hybrid resin과 UV 나 노임프린트을 이용하여 저반사 나노구조를 성형하고 IPL (intense pulsed light)를 이용하여 열처리를 수행한 뒤, 제작된 나노구조 필름의 투과율과 내스크래치성을 평가하여 나노구조의 성형성과 기계적 물성의 변화를 관찰하였다. 나노패턴 의 특성에 의해서 나노구조의 투과율은 550 nm 파장에서 97.6%로 고투과율의 기능을 확인하였으며, IPL을 이용한 열처 리를 진행한 경우 Hotplate를 이용한 열처리보다 경도는 0.51 GPa로, 0.27 GPa로 열처리한 시편에 비해 1.8배 향상하였 으며, 동일 실험 조건에서 탄성율은 Hotplate 이용 시 4 GPa에서 IPL 이용 시 5.9 GPa로 1.4배 증가하였다.
In this paper, We investigated the effect of heat treatment process using photo-thermal effect in order to improve mechanical properties of nanostructure on polymer films made by nanoimprint process with hybrid resin. Nanostructures which have a low refractive characteristic were fabricated by UV nanoimprint and after that heat treatment was performed using IPL (intense pulsed light) under process condition of 550 V voltage, pulse width 5 ms, frequency 0.5 Hz. The transmittance and mechanical property of fabricated nanostructure films were evaluated to observe changes in the pattern transfer rate and mechanical properties of nanostructures. The transmittance of the nanostructure was measured at 97.6% at 550 nm wavelength. Nanoindentation was performed to identify improved anti-scatch properties. Result was compared by the heat source. In case of post treatment with IPL, hardness was 0.51 GPa and in the case of hotplate was 0.27 GPa, resulting the increase of hardness of 1.8 times. Elastic modulus of IPL treated sample was 5.9GPa and Hotplate treated one was 4GPa, showing the 1.4 time increase.

Keywords organic-inorganic hybrid resin, IPL, UV-NIL