Journal of the Microelectronics and Packaging Society

본 연구에서는 기존의 silicon alkoxide(tetraethyl orthosilicate, TEOS)에 비해 단가가 저렴하여 상업화에 유리 한 물유리를 전구체로 사용하여 계면활성제의 농도에 따라 형성되는 다양한 크기의 실리카 중공 미세구(hollow silica microsphere, HSM)를 합성하였다. 계면활성제의 농도에 따른 실리카 중공 미세구의 형성에 대한 물성을 퓨리에 분광기 (Fourier transform infrared spectrometer), 접촉각 측정기(contact angle measurement), Brunauer-Emmett-Teller 및 Barrett- Joyner-Halenda 분석기와 전계방사형 주사전자현미경(field emission scanning electron microscopy)를 이용하여 분석하였 다. 계면활성제를 적정량의 농도로 투입하여 porou s한 물유리 기반 실리카 중공 미세구를 제조할 경우 비표면적은 169 m2/g, 평균 입자 크기 25.3 μm 및 표준편차는 6.25로 우수한 실리카 중공 미세구가 형성됨을 확인하였다.
In this study, hollow silica microspheres (HSM) of various sizes formed according to the concentration of surfactants using water glass as a precursor, which is advantageous for commercialization due to its lower unit cost compared to conventional silicon alkoxide (tetraethyl orthosilicate, TEOS) was synthesized. The physical properties of the silica hollow microspheres according to the concentration of surfactant were analyzed using Fourier transform infrared, contact angle measurement, Brunauer-Emmett-Teller and Barrett-Joyner-Halenda analyzers and field emission scanning electron microscopy. When porous water glass-based hollow silica spheres were prepared by adding a surfactant at an appropriate concentration, it was confirmed that excellent hollow silica spheres were formed with a specific surface area of 169 m2/g, an average particle size of 25.3 μm, and a standard deviation of 6.25.

Keywords surfactant; hollow microsphere; silica sphere; water glass; emulsion