2024

Vol.31 No.3

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  • Journal of the Microelectronics and Packaging Society
  • Volume 30(2); 2023
  • Article

Review

Journal of the Microelectronics and Packaging Society 2023;30(2):13-20. Published online: Aug, 18, 2023

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DOI : doi.org/10.6117/kmeps.2023.30.2.013

Applications of Self-assembled Monolayer Technologies in MEMS Fabrication

  • Woo-Jin Lee1 , Seung-Min Lee1 , and Seung-Kyun Kang1,2,3†
    1 Department of Materials Science and Engineering, Seoul National University, 1, Gwanak-ro, Gwanak-gu, Seoul 08826, Korea, 2 Research Institute of Advanced Materials, Seoul National University, 1, Gwanak-ro, Gwanak-gu, Seoul 08826, Korea, 3 Soft foundry institute, Seoul National University, 1, Gwanak-ro, Gwanak-gu, Seoul 08826, Korea
Corresponding author E-mail: kskg7227@snu.ac.kr
Abstract

The process of microelectromechanical system (MEMS) fabrication involves surface treatment to impart functionality to the device. Such surface treatment method is the self-assembled monolayer (SAM) technique, which modifies and functionalizes the surface of MEMS components with organic molecule monolayer, possessing a precisely controllable strength that depends on immersion time and solution concentration. These monolayers spontaneously adsorb on polymeric substrates or metal/ceramic components offering high precision at the nanoscale and modifying surface properties. SAM technology has been utilized in various fields, such as tribological property control, mass-production lithography, and ultrasensitive organic/biomolecular sensor applications. This paper provides an overview of the development and application of SAM technology in various fields.

Keywords Micro electro mechanical system, Self-assembled monolayer, Sensor, Surface treatment, Nano patterning

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