2024

Vol.31 No.3

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  • Journal of the Microelectronics and Packaging Society
  • Volume 30(2); 2023
  • Article

Review

Journal of the Microelectronics and Packaging Society 2023;30(2):65-70. Published online: Aug, 18, 2023

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DOI : doi.org/10.6117/kmeps.2023.30.2.065

Room Temperature Imprint Lithography for Surface Patterning of Al Foils and Plates

  • Tae Wan Park1 , Seungmin Kim2 , Eun Bin Kang1 , and Woon Ik Park1,2,†
    1 Department of Materials Science and Engineering, Pukyong National University, Busan 48513, Republic of Korea, 2 RanoM R&D center, RanoM Co., Ltd., Pusan 48548, Republic of Korea
Corresponding author E-mail: thane0428@pknu.ac.kr
Abstract

Nanoimprint lithography (NIL) has attracted much attention due to its process simplicity, excellent patternability, process scalability, high productivity, and low processing cost for pattern formation. However, the pattern size that can be implemented on metal materials through conventional NIL technologies is generally limited to the micro level. Here, we introduce a novel hard imprint lithography method, extreme-pressure imprint lithography (EPIL), for the direct nano-tomicroscale pattern formation on the surfaces of metal substrates with various thicknesses. The EPIL process allows reliable nanoscopic patterning on diverse surfaces, such as polymers, metals, and ceramics, without the use of ultraviolet (UV) light, laser, imprint resist, or electrical pulse. Micro/nano molds fabricated by laser micromachining and conventional photolithography are utilized for the nanopatterning of Al substrates through precise plastic deformation by applying high load or pressure at room temperature. We demonstrate micro/nanoscale pattern formation on the Al substrates with various thicknesses from 20 µm to 100 mm. Moreover, we also show how to obtain controllable pattern structures on the surface of metallic materials via the versatile EPIL technique. We expect that this imprint lithography-based new approach will be applied to other emerging nanofabrication methods for various device applications with complex geometries on the surface of metallic materials.

Keywords Imprint lithography, Al foil, Al plate, Nanostructure

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