2024

Vol.31 No.2

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  • Journal of the Microelectronics and Packaging Society
  • Volume 30(2); 2023
  • Article

Review

Journal of the Microelectronics and Packaging Society 2023;30(2):71-75. Published online: Aug, 18, 2023

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DOI : doi.org/10.6117/kmeps.2023.30.2.071

A Growth and Characterization of CsPbBr3 Thin Film Grown by Thermal Chemical Vapor Deposition

  • Ga Eun Kim, Min Jin Kim, Hyesu Ryu, and Sang Hyun Lee†
    School of Chemical Engineering, Chonnam National University, 77 Yong-bong-ro, Buk-gu, Gwangju 61186, Korea
Corresponding author E-mail: leeshyun@chonnam.ac.kr
Abstract

In this study, inorganic perovskite films with different compositions were grown by thermal chemical vapor deposition depending on the substrate and their optical properties were compared. Inorganic perovskite crystals were grown on SiO2/Si and c-Al2O3 substrates using CsBr and PbBr2, respectively, under the same growth conditions. Cs4PbBr6-CsPbBr3 crystallites were grown on the SiO2 with polycrystalline structure, while a CsPbBr3 (100) dominant thin film was formed on the c-Al2O3 substrate with single crystal structure. From the photoluminescence measurement, CsPbBr3 showed typical green emission centered at 534 nm with a full width at half maximum (FWHM) of about 91 meV. The Cs4PbBr6-CsPbBr3 mixed structure exhibits blue-shifted emission at 523 nm with a narrow FWHM of 63 meV and a fast decay time of 6.88 ns. These results are expected to be useful for application in photoelectric devices such as displays, solar cells, and light sensors based on inorganic metal perovskites.

Keywords Metal halide perovskite, Thermal chemical vapor deposition, CsPbBr3, Cs4PbBr6, Photoluminescence

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