Journal of the Microelectronics and Packaging Society

Spiders detect even tiny vibrations through their vibrational sensory organs. Leveraging their exceptional vibration sensing abilities, they can detect vibrations caused by prey or predators to plan attacks or perceive threats, utilizing them for survival. This paper introduces a nanoscale crack-based sensor mimicking the spider’s sensory organ. Inspired by the slit sensory organ used by spiders to detect vibrations, the sensor with the cracks detects vibrations and pressure with high sensitivity. By controlling the depth of these cracks, they developed a sensor capable of detecting external mechanical signals with remarkable sensitivity. This sensor achieves a gauge factor of 16,000 at 2% strain with an applied tensile stress of 10 N. With high signal-to-noise ratio, it accurately recognizes desired vibrations, as confirmed through various evaluations of external force and biological signals (speech pattern, heart rate, etc.). This underscores the potential of utilizing biomimetic technology for the development of new sensors and their application across diverse industrial fields.

Keywords Biomimetics, Mechanosensor, Crack sensor, Spider’s sensory organ, Vibration