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  • Journal of the Microelectronics and Packaging Society
  • Volume 25(4); 2018
  • Article

Review

Journal of the Microelectronics and Packaging Society 2018;25(4):137-142. Published online: Feb, 1, 2019

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DOI : 10.6117/kmeps.2018.25.4.137

The Effects of ZnO Sub-layer Thickness on the Room Temperature Ferromagnetism of (ZnO/Co) Multilayer

  • Sung-geun Kang1, Sungdong Kim2, †
    1Amkor Technology Korea 2Dept. of Mechanical System Eng. Seoul National University of Science and Technology
Corresponding author E-mail: sdkim@seoultech.ac.kr
Abstract

(ZnO/Co) 다층박막 구조를 이용하여 Co 도핑한 ZnO의 상온강자성 특성을 조사하였으며, 특히 ZnO 박막층의 두께가 (ZnO/Co) 다층박막의 상온강자성 특성에 미치는 영향을 조사하였다. ZnO 박막층의 두께가 20Å, 40Å일 때 증착상태에서는 각각 반자성과 강자성 특성을 나타내었으며 진공열처리 후에는 모두 강자성 특성을 나타내었다. 특히 (ZnO 40Å/Co xÅ)는 열처리 후에 음의 잔류자화 거동을 나타내었다. UV-Vis 분석을 통해서 Co 일부가 Zn와 치환되어 위치하고 있음을 확인할 수 있었으며, 열처리 전후에 대한 XPS 및 HRTEM EDS 분석에서 Co 클러스터의 형성은 관찰되지 않았다.
Room temperature ferromagnetism of Co doped ZnO was studied using (ZnO/Co) multilayer structure, and the effects of ZnO sub-layer thickness on the RT ferromagnetism was investigated. As for the as-deposited state, the diamagnetism was observed for (ZnO 20Å/Co xÅ) while the ferromagnetism was observed for (ZnO 40Å/Co xÅ). After vacuum-annealed, both showed the RT ferromagnetism and (ZnO 40Å/Co xÅ) structure interestingly showed negative remanence magnetization behavior. UV-Vis spectrometer revealed that Co atoms were substituted with Zn in ZnO and Co cluster was not found in XPS and HRTEM EDS analysis.

Keywords ferromagnetism, DMS, ZnO, Co, multilayer.