Journal of the Microelectronics and Packaging Society

The Titanium oxide (TiO2) is an attractive ceramic material which shows non-toxic, high refractive index, catalytic activity and biocompatibility, and can be fabricated at a low cost due to its high chemical stability and large anisotropy. TiO2 nanoparticles have been prepared by sol-gel method. The pH of solution can affect the TiO2 crystallinity during the formation of nanoparticles. The prepared nanoparticles were characterized using Fourier transform infrared spectroscopy, scanning electron microscopy, X-ray diffraction, photoluminescence spectroscopy in order to investigate their structural and photoluminescence properties. Through these analysis, the size of TiO2 nanoparticles were found to be smaller than 5 nm. As the crystallinity of the nanoparticles increased, the emission of PL in the 550 nm region increased. Therefore, luminescence characteristics can be improved by controlling the crystallinity of the TiO2 nanoparticles.

Keywords TiO2, Nanoparticles, Photoluminescence