Journal of the Microelectronics and Packaging Society

온도 및 압축응력 변화에 따른 PIN-PMN-PT계 압전 단결정의 유전 특성과 압전 특성을 조사하였다. 단결정의 결정상은 110oC 영역에서 강유전 rhombohedral 구조에서 tetragonal 구조로, 190oC 영역에서 tetragonal 구조로부터 상유 전 cubic 구조로 변화하였다. 전계 인가에 따른 분극 및 변위의 변화율로부터 압전상수와 비유전율을 계산하였으며, 이는 계측기로부터 측정된 값과 유사한 수준을 나타내었다. 샘플에 인가되는 압축응력이 증가할수록 압전상수 d33과 비유전율 값은 증가하는 경향성을 나타내었다. 측정 온도 5oC에서 샘플에 인가되는 압축응력이 60 MPa인 경우 d33 값이 4500 pC/ N로 계산되었으며, 측정 온도 60oC인 경우, 샘플에 인가되는 압축응력이 40 MPa 일 때 비유전율 62000이 계산되었다. 압축응력이 높아질 때 압전상수와 비유전율 값이 상승한 것은 rhombohedral 상에서 orthorhombic 상으로의 전이에 기인 한 것으로 판단된다.
Dielectric and piezoelectric properties of PIN-PMN-PT piezoelectric single crystals with variation of temperature and compressive stress were investigated. The crystal phase of the single crystal was changed from the ferroelectric rhombohedral structure to tetragonal structure in the 110oC region and from the tetragonal structure to the paraelectric cubic structure in the 190oC region. The piezoelectric constant and relative dielectric constant were calculated from the rate of change of polarization and displacement with the application of electric field, which was similar to the value measured from the instrument. As the compressive stress applied to the sample increased, the piezoelectric constant d33 and relative dielectric constant values tended to increase. When the compressive stress applied to the sample at 5oC was 60 MPa, the d33 was calculated as 4,500 pC/N. At 60oC, the relative dielectric constant of 62000 was calculated when the compressive stress applied to the sample was 40 MPa. The increase in piezoelectric constant and relative dielectric constant when the compressive stress increased could be attributed to the phase transition from the rhombohedral structure to orthorhombic.

Keywords Pb(In1/2Nb1/2)O3, PMN-PT, single crystal, piezoelectric coefficient, strain